JPH0261137B2 - - Google Patents

Info

Publication number
JPH0261137B2
JPH0261137B2 JP20775387A JP20775387A JPH0261137B2 JP H0261137 B2 JPH0261137 B2 JP H0261137B2 JP 20775387 A JP20775387 A JP 20775387A JP 20775387 A JP20775387 A JP 20775387A JP H0261137 B2 JPH0261137 B2 JP H0261137B2
Authority
JP
Japan
Prior art keywords
heat sink
crystal
internal heat
quartz tube
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20775387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6450519A (en
Inventor
Takahiro Kanba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
Original Assignee
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanley Electric Co Ltd filed Critical Stanley Electric Co Ltd
Priority to JP20775387A priority Critical patent/JPS6450519A/ja
Publication of JPS6450519A publication Critical patent/JPS6450519A/ja
Publication of JPH0261137B2 publication Critical patent/JPH0261137B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP20775387A 1987-08-21 1987-08-21 Apparatus for liquid growth of semiconductor crystal Granted JPS6450519A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20775387A JPS6450519A (en) 1987-08-21 1987-08-21 Apparatus for liquid growth of semiconductor crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20775387A JPS6450519A (en) 1987-08-21 1987-08-21 Apparatus for liquid growth of semiconductor crystal

Publications (2)

Publication Number Publication Date
JPS6450519A JPS6450519A (en) 1989-02-27
JPH0261137B2 true JPH0261137B2 (en]) 1990-12-19

Family

ID=16544973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20775387A Granted JPS6450519A (en) 1987-08-21 1987-08-21 Apparatus for liquid growth of semiconductor crystal

Country Status (1)

Country Link
JP (1) JPS6450519A (en])

Also Published As

Publication number Publication date
JPS6450519A (en) 1989-02-27

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